A method for the deposition of thin films of the perovskite LaFeO3 on glass is proposed. The films are prepared by spray pyrolysis using an ethylene glycol solution of mixed metal citrate complexes and O-2 or N-2 as carrier gas at substrate temperatures between 350 degrees C and 400 degrees C and post-deposition annealing at 350-480 degrees C in air. The phase composition, crystal structure, morphology and adhesion of the prepared films (40-600 nm thick) are studied by X-ray diffraction, energy dispersive X-ray microanalysis, scanning electron microscopy, and atomic force microscopy. The influence of the conditions of deposition and post-deposition annealing is studied and optimal parameters of the procedure are described. Single phase dense uniform films with crystallites of approx. 30 nm are obtained. (C) 2014 Elsevier B.V. All rights reserved.