Pd 촉매금속의 표면형상 변형에 의한 고감도 MEMS 형 마이크로 수소가스 센서 제조공정

김정식; 김범준; Jung-Sik Kim; Bum-Joon Kim

Korean Journal of Materials Research, Vol.24, No.10, 532-537, October, 2014

DOI10.3740/MRSK.2014.24.10.532 Export Citation

Pd 촉매금속의 표면형상 변형에 의한 고감도 MEMS 형 마이크로 수소가스 센서 제조공정

Highly Sensitive MEMS-Type Micro Sensor for Hydrogen Gas Detection by Modifying the Surface Morphology of Pd Catalytic Metal

김정식^†, 김범준

서울시립대학교 신소재공학과

Jung-Sik Kim^†, and Bum-Joon Kim

Department of Materials Science and Engineering, The University of Seoul, Seoul 130-743, Korea

E-mail:

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about 5 mm × 4 mm and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at 70 oC for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

Keywords:hydrogen sensor;palladium;MEMS;sensitivity;nanoporous film

[References]

DiMeo Jr F, Chen IS, Chen P, Neuner J, Roerhl A, Welch J, Sens. Actuators B, 117, 10 (2006)
Yoon JH, Kim JS, Solid State Ion., 192(1), 668 (2011)
Kim BJ, Kim JS, Mater. Chem. Phys., 138(1), 366 (2013)
Yoon JH, Kim BJ, Kim JS, Mater. Chem. Phys., 133(2-3), 987 (2012)
Wu F, Morris JE, Thin Solid Films, 246(1-2), 17 (1994)
Favier F, Walter EC, Zach MP, Benter T, Penner RM, Science, 293, 2227 (2001)
Vitae SC, Vitae NK, Vitae JF, Chung CH, Sens. Actuators B, 136, 388 (2009)
Lewis FA, Int. J. Hydrogen Energy, 20(7), 587 (1995)
Jewell LL, Davis BH, Appl. Catal. A: Gen., 310, 1 (2006)
Qurashi A, Tabet N, Faiz M, Yamzaki T, Nanoscale Res. Lett., 4, 948 (2009)
Sennik E, Colak Z, Kilinc N, Ozturk ZZ, Int. J. Hydrog. Energy, 35(9), 4420 (2010)
Baik JM, Kim MH, Larson C, Yavuz CT, Stucky GD, Wodtke AM, Moskovits M, Nano Lett., 9(12), 3980 (2009)
Cao Q, Rogers JA, Adv. Mater., 21, 29 (2009)
Kong J, Chapline MG, Dai HJ, Adv. Mater., 13(18), 1384 (2001)
Sun Y, Wang HH, Adv. Mater., 19(19), 2818 (2007)
Jo SY, Kim JY, Kim SS, Kor. Mater. Res., 23(5), 281 (2013)
Kocanda M, Potluri L, Haji-Sheikh M, Ballantine DS, Bose A, in Proc. 8th IEEE Sens. Conf. (Christchurch, New Zealand, 2009) p. 308., 308 (2009)

[1] DiMeo Jr F, Chen IS, Chen P, Neuner J, Roerhl A, Welch J, Sens. Actuators B, 117, 10 (2006)

[2] Yoon JH, Kim JS, Solid State Ion., 192(1), 668 (2011)

[3] Kim BJ, Kim JS, Mater. Chem. Phys., 138(1), 366 (2013)

[4] Yoon JH, Kim BJ, Kim JS, Mater. Chem. Phys., 133(2-3), 987 (2012)

[5] Wu F, Morris JE, Thin Solid Films, 246(1-2), 17 (1994)

[6] Favier F, Walter EC, Zach MP, Benter T, Penner RM, Science, 293, 2227 (2001)

[7] Vitae SC, Vitae NK, Vitae JF, Chung CH, Sens. Actuators B, 136, 388 (2009)

[8] Lewis FA, Int. J. Hydrogen Energy, 20(7), 587 (1995)

[9] Jewell LL, Davis BH, Appl. Catal. A: Gen., 310, 1 (2006)

[10] Qurashi A, Tabet N, Faiz M, Yamzaki T, Nanoscale Res. Lett., 4, 948 (2009)

[11] Sennik E, Colak Z, Kilinc N, Ozturk ZZ, Int. J. Hydrog. Energy, 35(9), 4420 (2010)

[12] Baik JM, Kim MH, Larson C, Yavuz CT, Stucky GD, Wodtke AM, Moskovits M, Nano Lett., 9(12), 3980 (2009)

[13] Cao Q, Rogers JA, Adv. Mater., 21, 29 (2009)

[14] Kong J, Chapline MG, Dai HJ, Adv. Mater., 13(18), 1384 (2001)

[15] Sun Y, Wang HH, Adv. Mater., 19(19), 2818 (2007)

[16] Jo SY, Kim JY, Kim SS, Kor. Mater. Res., 23(5), 281 (2013)

[17] Kocanda M, Potluri L, Haji-Sheikh M, Ballantine DS, Bose A, in Proc. 8th IEEE Sens. Conf. (Christchurch, New Zealand, 2009) p. 308., 308 (2009)