Zn2(1-x)MnxSiO4(0.07≤×≤0.15) green phosphor was prepared by solid state reaction. The first heating was at 900oC-1250oC in air for 3 hours and the second heating was at 900oC in N2/H2(95%/5%) for 2 hours. The size effect of SiO2 in forming Zn2SiO4 was investigated. The temperature for obtaining single phase Zn2SiO4 was lowered from 1100oC to 1000oC by decreasing the SiO2 particle size from micro size to submicro size. The effect of the activators for the Photoluminescence (PL) intensity of Zn2SiO4:Mn2+ was also investigated. The PL intensity properties of the phosphors were investigated under vacuum ultraviolet excitation (147 nm). The emission spectrum peak was between 520 nm and 530 nm, which was involved in green emission area. MnCl2·4H2O, the activator source, was more effective in providing high emission intensity than MnCO3. The optimum conditions for the best optical properties of Zn2SiO4:Mn2+ were at x = 0.11 and 1100oC. In these conditions, the phosphor particle shape was well dispersed spherical and its size was 200 nm.