- Previous Article
- Next Article
- Table of Contents
Korean Journal of Materials Research, Vol.20, No.10, 555-558, October, 2010
구리 박막의 표면형상과 물성에 대한 전류밀도 영향
Property and Surface Morphology of Copper Foil on the Current Density
E-mail:
This study examined the effect of current density on the surface morphology and physical properties of copper plated on a polyimide (PI) film. The morphology, crystal structure, and electric characteristics of the electrodeposited copper foil were examined by scanning electron microscopy, X-ray diffraction, and a four-point probe, respectively. The surface roughness, crystal growth orientation and resistivity was controlled using current density. Large particles were observed on the surface of the copper layer electroplated onto a current density of 25 mA/cm2. However, a uniform surface and lower resistivity were obtained with a current density of 10 mA/cm2. One of the important properties of FCCL is the flexibility of the copper foil. High flexibility of FCCL was obtained at a low current density rather than a high current density. Moreover, a reasonable current density is 20 mA/cm2 considering the productivity and mechanical properties of copper foil.
- Chung TG, Kim YH, Na JG, J. Kor. Inst. Met. & Mater., 29(11), 1097 (1991)
- Hwang KH, Lee KI, Joo SK, Kang T, J. Kor. Cryst. Growth & Cryst. Tech., 1(2), 80 (1991)
- Sze SM, VLSI Technology, 2nd Ed, p. 373, McGraw Hill, USA (1988). (1988)
- McGuire GF, Semiconductor Materials and Process Handbook, p. 587, Noyes Publication, (1988). (1988)
- Lee EJ, Kim JS, Journal of the Institute of Industrial Technology, (ISSN : 1229-1773), 6(2), 11 (1998)
- Kim JJ, Kang MS, HWAHAK KONGHAK, 39(6), 721 (2001)
- Min BS, Chung WS, Kim IG, J. Kor. Inst. Met. & Mater., 40(12), 12 (2002)
- Ibanez A, Fatas E, Surf. Coating. Tech., 191, 7 (2005)
- Liang T, Liu YQ, Fu ZQ, Luo TY, Zhang KY, Thin Solid Films, 473(2), 247 (2005)
- Song Y, Seo JH, Lee YS, Rha SK, Korean J. Mater. Res., 19(6), 344 (2009)
- Lee HS, Kim HS, Lee CM, J. Kor. Inst. Met. & Mater., 39(8), 920 (2001)
- Choi JW, Oh TS, Kim YH, J. Kor. Inst. Met. & Mater., 35(5), 542 (1997)
- Woo TG, Park IS, Lee HW, Lee MH, Park EK, Hwang YK, Seol KW, J. Kor. Inst. Met. & Mater, 45(7), 423 (2007)
- Park SC, Min KJ, Lee KH, Jeong Y, Park YB, Korean J. Mater. Res., 18(9), 486 (2008)
- Kang HJ, Park BN, Park SJ, Choi SY, Journal of the Institute of Electronic Technology, (ISSN : 1225-214X), 23, 8 (2003)
- Brande PV, Winand R, Surf. Coating. Tech., 52, 1 (1992)
- Zhou Z, O'Keefe TJ, J. Appl. Electrochem., 28(4), 461 (1998)
- Yang JJ, Huang YL, Xu KW, Surf. Coating. Tech., 201, 5574 (2007)
- Kuan TS, Inoki CK, Oehrlein GS, Rose K, Zhao YP, Wang GC, Rossnagel SM, Cabral C, Mater. Res. Soc. Symp. Proc. 612, D7.1.1 (2000), ed. Maex K, Joo YC, Oehrlein GS, Ogawa S, Wetzel JT(Materials Research Society, San Francisco, April, 2000). (2000)