Korean Journal of Materials Research, Vol.18, No.2, 69-72, February, 2008
LTCC 를 이용한 SnO2 가스 센서
SnO2 Gas Sensors Using LTCC (Low Temperature Co-fired Ceramics)
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A sensor element array for combinatorial solution deposition research was fabricated using LTCC
(Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800oC for 1 hour after lamination at 70oC under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200oC for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600oC for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400oC.
Keywords:LTCC (Low Temperature Co-fired Ceramics);combinatorial solution deposition;SnO2 sol;gas sensor
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