화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.17, No.9, 453-457, September, 2007
잉크젯 프린팅된 은(Ag) 박막의 등온 열처리에 따른 미세조직과 전기 비저항 특성 평가
Microstructure and Electrical Resistivity of Ink-Jet Printed Nanoparticle Silver Films under Isothermal Annealing
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Interest in use of ink-jet printing for pattern-on-demand fabrication of metal interconnects without complicated and wasteful etching process has been on rapid increase. However, ink-jet printing is a wet process and needs an additional thermal treatment such as an annealing process. Since a metal ink is a suspension containing metal nanoparticles and organic capping molecules to prevent aggregation of them, the microstructure of an ink-jet printed metal interconnect 'as dried' can be characterized as a stack of loosely packed nanoparticles. Therefore, during being treated thermally, an inkjet-printed interconnect is likely to evolve a characteristic microstructure, different from that of the conventionally vacuum-deposited metal films. Microstructure characteristics can significantly affect the corresponding electrical and mechanical properties. The characteristics of change in microstructure and electrical resistivity of inkjet-printed silver (Ag) films when annealed isothermally at a temperature between 170 and were analyzed. The change in electrical resistivity was described using the first-order exponential decay kinetics. The corresponding activation energy of 0.44 eV was explained in terms of a thermally-activated mechanism, i.e., migration of point defects such as vacancy-oxygen pairs, rather than microstructure evolution such as grain growth or change in porosity.
  1. Park JW, Baek SG, Scripta Mater., 55(12), 1139 (2006)
  2. Kim HC, Alford TL, Allee DR, Appl. Phys. Lett., 81(22), 4287 (2002)
  3. Thompson CV, Annu. Rev. Mater., 20, 245 (1990)
  4. Humphreys FJ, Hatherly M, Recrystallization and Related Annealing Phenomena, Chapter 9, Elsevier Science Ltd., Oxford, U. K., (1995) (1995)
  5. Michels A, Krill CE, Ehrhardt H, Birringer R, Wu DT, Acta Mater., 47(7), 2143 (1999)
  6. Brophy JH, Rose RM, Wulff J, The Structure and Properties of Metals, Vol. 2, Thermodynamics of Structure, p. 84, John Wiley and Sons, Inc., New York, (1964) (1964)
  7. Namba Y, Jpn. J. Appl. Phys., 9(11), 1326 (1970)
  8. GLEITER H, Prog. Mater. Sci., 33(4), 223 (1989)
  9. Qin XY, Zhang LD, Cheng GS, Liu XJ, Jin D, J. Phys. D, Appl. Phys., 31(1), 24 (1998)
  10. Balluffi RW, J. Nucl. Mats., 69-70(1-2), 240 (1978)
  11. Doyama M, Kohler JS, Phys. Rev., 127(1), 21 (1962)
  12. Cuddy LJ, Machlin ES, Phil. Mag., 7(77), 745 (1962)
  13. Quere Y, J. Phys. Soc. Jap. Supple III, 18, 91 (1963)