AIP 와 스퍼터링으로 복합증착된 420 스테인리스강의 TiN과 CrN 박막에 미치는 중간층의 영향

최웅섭; 김현승; 박범수; 이경구; 이도재; 이광민; Woong-Sub Choi; Hyun-Seung Kim; Burm-Su Park; Kyung-Ku Lee; Doh-Jae Lee; Kwang-Min Lee

Korean Journal of Materials Research, Vol.17, No.5, 256-262, May, 2007

DOI10.3740/MRSK.2007.17.5.256 Export Citation

AIP 와 스퍼터링으로 복합증착된 420 스테인리스강의 TiN과 CrN 박막에 미치는 중간층의 영향

Effect of Interlayer on TiN and CrN Thin Films of STS 420 Hybrid-Deposited by AlP and DC Magnetron Sputtering

최웅섭, 김현승, 박범수¹, 이경구², 이도재, 이광민^†

전남대학교 신소재공학부 및 기능성 표면공학연구소
¹에이지 광학
²타이타늄 특수합금부품개발지원센터

Woong-Sub Choi, Hyun-Seung Kim, Burm-Su Park¹, Kyung-Ku Lee², Doh-Jae Lee, and Kwang-Min Lee^†

Division of Materials Science and Engineering Research Institute for Functional Surface Engineering, Chonnam National University, Gwagju, 500-757, Korea
¹A.G. Optiocs CO., Ancheong-Dong, Gwangju, 500-258, Korea
²R&D Center for Titanium and Special Alloys, Gwangju, 500-706, Korea

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Effects of interlayer and the combination of different coating methods on the mechanical and corrosion behaviors of TiN and CrN coated on 420 stainless steel have been studied. STS 420 specimen were tempered at for 1 hr in vacuum furnace. The TiN and CrN thin film with 2 thickness were coated by arc ion plating and DC magnetron sputtering following the formation of interlayer for pure titanium and chromium with 0.2 thickness. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and roughness tester. Mechanical properties such as hardness and adhesion also were examined. XRD patterns of TiN thin films showed that preferred TiN (111) orientation was observed. The peaks of CrN (111) and (300) were only observed in CrN thin films deposited by arc ion plating. Both TiN and CrN deposited by arc ion plating had the higher adhesion and hardness compared to those formed by magnetron sputtering. The specimen of TiN and CrN on which interlayer deposited by magnetron sputtering and thin film deposited by arc ion plating had the highest adhesion with 22.2 N and 19.2 N. respectively. TiN and CrN samples shown the most noble corrosion potentials when the interlayers were deposited by using magnetron sputtering and the metal nitrides were deposited by using arc ion plating. The most noble corrosion potentials of TiN and CrN were found to be approximately -170 and -70 mV, respectively.

Keywords:TiN;CrN;corrosion;Hybrid coating

[References]

ASM International Handbook Committee, Stainless Steel, p.17, Davis JR, ASM International, U.S.A (1996) (1996)
Kim YG, J. of the Korean Society for Heat Treatment, 5, 117 (1992)
Chou WJ, Yu GP, Huang JH, Corrosion Sicence, 43, 2023 (2001)
Barshilia HC, Prakash MS, Poojari A, Rajam KS, Thin Solid Films, 460(1-2), 133 (2004)
Thornton JA, Ann. Rev. Sci., 7, 239 (1977)
Melchoir H, J. Appl. Phy., 52, 5722 (1981)
William Grips VK, Barshilia HC, The Solid Film, 514, 204 (2006)
Ibrahim MAM, Korablov SF, Corrosion Science, 44, 815 (2002)
Jung BH, Kim HJ, J. of the Korean Society for the Heat Treatment, 17, 29 (2004)
Randhawa H, Surf. Coat. Technol., 33, 53 (1987)
Shiao MH, Shieu FS, Thin Solid Films, 386(1), 27 (2001)
Yoon SY, Lee YB, J. Kor. Ins. Sur. Eng., 35, 199 (2002)
Matsue T, Hanabusa T, lkeuchi Y, Vacuum, 66, 435 (2002)
Kim GS, Lee SY, Sur. Coat. Tech., 171, 83 (2003)
Knight JG, Page TF, Thin Solid Films, 193/194, 431 (1990)
Deblanc Bauer A, Herranen M, Ljungcrants H, Carlsson JO, Sundgren JE, Surf. Coal. Technol., 91, 208 (1997)
Chen YI, Duh JG, Surf. Coat. Technol., 46, 371 (1991)
Rickcrby DS, Bull J, Robertson T, Hendry A, Surf. Coat. Technol., 41, 63 (1990)
Harju SH, Lee M, Lee I, J. Kor. Inst. Sur. Eng., 30, 33 (1997)
Takadoun J, Bcnnami HH, Surf. Coal. Technol., 96, 371 (1997)
In CB, Jung BJ, Lee WJ, J. Kor. Cer. Soc., 31, 731 (1994)
Stallard J, Poulat S, Teer DG, Tribology International., 39, 159 (2006)
Chou WJ, Yu GY, Huang JH, Corrosion Science, 43, 2023 (2001)
Denny A, Jones, Principles and Prevention or Corrosion, 2nd Ed., Prentice-Hall, 143 (1997) (1997)
Harish C, Surya Prakash M, Rajam KS, Thin Solid Films, 460, 133 (2004)
Bull SJ, Chalker PR, Ayres CF, Rickcrby DS, Mat. Sci. Technol., 39, 71 (1991)
Massiani Y, Medjajcd A, Gravicr P, Crousier JP, Thin Solid Films, 37, 217 (1992)
Lopez D, Sanchez C, Toro A, Wear, 258, 684 (2005)

[Referenced By]

[1] ASM International Handbook Committee, Stainless Steel, p.17, Davis JR, ASM International, U.S.A (1996) (1996)

[2] Kim YG, J. of the Korean Society for Heat Treatment, 5, 117 (1992)

[3] Chou WJ, Yu GP, Huang JH, Corrosion Sicence, 43, 2023 (2001)

[4] Barshilia HC, Prakash MS, Poojari A, Rajam KS, Thin Solid Films, 460(1-2), 133 (2004)

[5] Thornton JA, Ann. Rev. Sci., 7, 239 (1977)

[6] Melchoir H, J. Appl. Phy., 52, 5722 (1981)

[7] William Grips VK, Barshilia HC, The Solid Film, 514, 204 (2006)

[8] Ibrahim MAM, Korablov SF, Corrosion Science, 44, 815 (2002)

[9] Jung BH, Kim HJ, J. of the Korean Society for the Heat Treatment, 17, 29 (2004)

[10] Randhawa H, Surf. Coat. Technol., 33, 53 (1987)

[11] Shiao MH, Shieu FS, Thin Solid Films, 386(1), 27 (2001)

[12] Yoon SY, Lee YB, J. Kor. Ins. Sur. Eng., 35, 199 (2002)

[13] Matsue T, Hanabusa T, lkeuchi Y, Vacuum, 66, 435 (2002)

[14] Kim GS, Lee SY, Sur. Coat. Tech., 171, 83 (2003)

[15] Knight JG, Page TF, Thin Solid Films, 193/194, 431 (1990)

[16] Deblanc Bauer A, Herranen M, Ljungcrants H, Carlsson JO, Sundgren JE, Surf. Coal. Technol., 91, 208 (1997)

[17] Chen YI, Duh JG, Surf. Coat. Technol., 46, 371 (1991)

[18] Rickcrby DS, Bull J, Robertson T, Hendry A, Surf. Coat. Technol., 41, 63 (1990)

[19] Harju SH, Lee M, Lee I, J. Kor. Inst. Sur. Eng., 30, 33 (1997)

[20] Takadoun J, Bcnnami HH, Surf. Coal. Technol., 96, 371 (1997)

[21] In CB, Jung BJ, Lee WJ, J. Kor. Cer. Soc., 31, 731 (1994)

[22] Stallard J, Poulat S, Teer DG, Tribology International., 39, 159 (2006)

[23] Chou WJ, Yu GY, Huang JH, Corrosion Science, 43, 2023 (2001)

[24] Denny A, Jones, Principles and Prevention or Corrosion, 2nd Ed., Prentice-Hall, 143 (1997) (1997)

[25] Harish C, Surya Prakash M, Rajam KS, Thin Solid Films, 460, 133 (2004)

[26] Bull SJ, Chalker PR, Ayres CF, Rickcrby DS, Mat. Sci. Technol., 39, 71 (1991)

[27] Massiani Y, Medjajcd A, Gravicr P, Crousier JP, Thin Solid Films, 37, 217 (1992)

[28] Lopez D, Sanchez C, Toro A, Wear, 258, 684 (2005)