Korean Journal of Materials Research, Vol.17, No.3, 160-166, March, 2007
TRISO 피복 입자에서 증착 조건이 탄화규소층의 특성에 미치는 영향
Effect of Deposition Parameters on the Property of SiC Layer in TRISO-Coated Particles
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초록
TRISO coatings on surrogate kernels were conducted by a fluidized-bed chemical vapor deposition (FBCVD) method. Effects of the deposition temperature and the gas flow rate on the properties of SiC layer were investigated in the TRISO-coated particles. Deposition rate of the SiC layer decreased as the deposition temperature increased in the temperature range of . At the deposition temperature of the SiC layer contained an excess carbon, whereas the SiC layers had stoichiometric compositions at . Hardness and elastic modulus measured by a nanoindentation method were the highest in the SiC layer deposited at . The SiC layer deposited at the gas flow rate of 4000 sccm exhibited a high porosity and contained large pores more than , being due to a violent spouting of particles. On the other hand, the SiC layer deposited at 2500 sccm revealed the lowest porosity.
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