Korean Journal of Materials Research, Vol.16, No.8, 503-510, August, 2006
양극산화법에 의한 다공성 SnO2 피막
Porous SnO2 Films Fabricated Using an Anodizing Process
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The measurement of specific gases is based on the reversible conductivity change of sensing materials in semiconductor type gas sensors. For an application as gas sensors of high sensitivity, porous films have been fabricated by anodizing of pure Sn foil in oxalic acid and characteristics of anodic tin oxide films have been investigated. Pore diameter and distribution were dependent on process conditions such as electrolyte concentration, applied voltage, anodizing temperature, and time. Characteristics of anodic films were explained with current density-time curves.
- Seong KP, Choi D, Kim JH, Moon JH, Myoung TH, Lee BT, Korean J. Mater. Res., 10(11), 778 (2000)
- Park Y, Lee W, Choi Y, Lee H, Park J, Korean J. Mater. Res., 14(12), 840 (2004)
- Goepel W, Schierbaum KD, Sensors and Actuators B, 26(1-3), 1 (1995)
- Dieguez A, Rodriguez AR, Morante JR, Kappler J, Barsan N, Gopel W, Sensors and Actuators B, 60(23), 125 (1999)
- Budak S, Miao GX, Ozdemir M, Chetry KB, Gupta A, J. Cryst. Growth, 291(2), 405 (2006)
- Ma YJ, Zhou F, Lu L, Zhang Z, Z. Solid State Communications, 130(5), 313 (2004)
- Zhu W, Wang WZ, Xu HL, Shi JL, Mater. Chem. Phys., 99(1), 127 (2006)
- Kim M, Lee JS, Yoo JB, Korean J. Mater. Res., 14(2), 133 (2004)
- Cho SH, Oh HJ, Joo EK, Yoo CW, Chi CS, Korean J. Mater. Res., 12(7), 533 (2002)
- Jang JM, Oh HJ, Lee JH, Cho SH, Chi CS, Korean J. Mater. Res., 12(5), 353 (2002)
- Shin HC, Dong J, Liu ML, Adv. Mater., 16(3), 237 (2004)
- Hoar TP, Yahalom J, J. Electrochem. Soc., 110(6), 614 (1963)
- Diggle JW, Downie TC, Goulding CW, Chem. Rev., 69(3), 365 (1969)
- Lee KH, Lee HY, Jeong WY, J. of Kor. Electrochem. Soc., 4(2), 47 (2001)