Polycrystalline thin films on (200 nm)/Si (100) substrates were prepared using liquid-delivery metalorganic chemical vapor deposition. Microstructures and ferromagnetic properties were investigated as a function of doped Co concentration. Ferromagnetic behaviors of polycrystalline films were observed at room temperature, and the magnetic and structural properties strongly depended on the Co distribution, which varied widely with doped Co concentration. The annealed thin films with 0.05 showed a homogeneous structure without any clusters, and pure ferromagnetic properties of thin films are only attributed to the X Xphases. On the other hand, in case of thin films above x = 0.05, Co-rich clusters formed in a homogeneous phase, and the overall ferromagnetic (FM) properties depended on both FMTCO and FMCo. Co-rich clusters with about 10-150 nm size decreased the value of Mr (the remanent magnetization) and increased the saturation magnetic field.