화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.13, No.6, 369-373, June, 2003
자기터널절합에서 자기 및 자기저항의 접합크기 의존성
Junction Size Dependence of Magnetic and Magnetotransport Properties in MTJs
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Magneto-optic Kerr Effect(MOKE), AFM and magnetoresistance measurements have been carried out on as-deposited and annealed Magnetic Tunnel Junctions(MTJs) with junction sizes 180, 250, 320 and 380 μm in order to investigate the correlation among interlayer exchange coupling, surface roughness and junction size. Relatively irregular variations of coercivity H c (∼17.5 Oe) and interlayer exchange coupling H E (∼17.5 Oe) are observed over the junction in as-deposited sample prepared by DC magnetron sputtering. After annealing at 200 ? C , H c decreases to 15 Oe, while H E increases to 20 Oe with smooth local variation. H E shows very good correlation with surface roughness across the junction in agreement with Neel's orange peel coupling. The increasing slope per μm of normalized H c and H E are same near junction edge along free-layer direction irrespective of junction size, giving relatively uniform H c and H E for wider junction size. Thickness profiles of the junctions measured with α -step show increasingly flat top surface for larger junctions, indicating better uniformity for large. junctions in agreement with the normalized H c and H / E curves. TMR ratios also increase with increasing junction size, indicating improvement for larger uniform junctions.
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