RF 스퍼터링용 Hydroxyapatite 타겟의 제조 및 Hydroxyapatite/Ti-6Al-4V 합금 박막의 특성(I)

정찬회; 김명한; Chan-Hoi Jung; Myung-Han Kim

Korean Journal of Materials Research, Vol.13, No.4, 205-212, April, 2003

DOI10.3740/MRSK.2003.13.4.205 Export Citation

RF 스퍼터링용 Hydroxyapatite 타겟의 제조 및 Hydroxyapatite/Ti-6Al-4V 합금 박막의 특성(I)

The Fabrication of Hydroxyapatite Targets and the Characteristics of Hydroxyapatite/Ti-6Al-4V Alloy Thin Films by RF Sputtering(I)

정찬회^†, 김명한

충북대학교 재료공학과

Chan-Hoi Jung^†, and Myung-Han Kim

Dept. of Materials Engineering, Chungbuk National University, 48, Gaesin-dong, Cheongju Chungbuk, Korea, 361-763

E-mail:

RF sputtering process was applied to produce thin hydroxyapatite[HA, Ca10( PO 4 ) 6 (OH) 2 films on Ti-6Al-4V alloy substrates. To make a 101.6 mm dia. × 5 mm HA target, the commercial HA powder was first calcinated for 3h at 200 ? C . A certain amount of the calcinated HA powder was pressed under a pressure of 20,000 psi by the cold isostatic press(CIP) and the pressed HA target was sintered for 6 h at 1,200 ? C . The effects of different heat treating conditions on the bonding strength between HA thin films and Ti-6Al-4V alloy substrates were studied. Before deposition, the alloy substrates were annealed for 1 h at 850 ? C under 3.0 {\times}10 ?3 Xtorr, and after deposition, the hydroxyapatite/Ti-6Al-4V alloy thin films were annealed for 1 h at 400, 600 and 800 ? C under the atmosphere, respectively. Experimental results represented that the HA thin films on the annealed substrates had higher hardness than non-heat treated substrates before the deposition.

Keywords:Hydroxyapatite;Ti-6Al-4V alloy;RF sputtering;Cold isotatic press

[References]

Yoo JJ, Lee WI, Tissue Engineering ; Concept and Applications, p.45, Korea Medical Publishing Company, Seoul, Korea, (1998) (1998)
Callister WD Jr, Materials Science and Engineering an Introduction, 5th ed., p 841, SciTech Media, Seoul, Korea, (2000) (2000)
van Dijk K, Schaeken HG, Woike JGG, Jansen JA, Biomaterials, 17, 405 (1998)
Long JD, Xu S, Jiang JW, Lu JH, Ostrikov KN, Diong CH, Mater. Sci. Eng. C, 20, 175 (2002)
van Dijk K, Verhoeven J, Mare CHM, Habraken FHPM, Jansen JA, The Solis Films, 309, 191 (1997)
Ong JL, Villarreal DR, Kavin R, Ma K, J. Mater. Sci. -Mater. Med., 12, 491 (2001)
Ding SJ, Ju CP, Chern Lin JH, John Wiley & Sons, J. Biorned Mater Res, 44, 266 (1999)
Lo WJ, Grant DM, John Wiley & Sons, J. Biomed Mater Res, 46, 408 (1999)
Ding SJ, Ju CP, Chern Lin JH, John Wiley & Sons, J. Biomed Mater Res, 47, 551 (1999)
van Dijk K, Schaeken HG, Mare CHM, Verhoeven J, Wolke JGG, Habraken FHPM, Jansen JA, Surf. Coat. Technol., 76-77, 206 (1995)
Lo WJ, Grant DM, Ball MD, Welsh BS, Howdle SM, Antonov EN, Bagratashvili VN, Popov PK, John Wiley & Sons, J. Biomed Mater Res, 50, 536 (2000)
Yamashita K, Matsuda M, Arashi T, Umegaki T, Biomaterials, 19, 1239 (1998)

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[2] Callister WD Jr, Materials Science and Engineering an Introduction, 5th ed., p 841, SciTech Media, Seoul, Korea, (2000) (2000)

[3] van Dijk K, Schaeken HG, Woike JGG, Jansen JA, Biomaterials, 17, 405 (1998)

[4] Long JD, Xu S, Jiang JW, Lu JH, Ostrikov KN, Diong CH, Mater. Sci. Eng. C, 20, 175 (2002)

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[9] Ding SJ, Ju CP, Chern Lin JH, John Wiley & Sons, J. Biomed Mater Res, 47, 551 (1999)

[10] van Dijk K, Schaeken HG, Mare CHM, Verhoeven J, Wolke JGG, Habraken FHPM, Jansen JA, Surf. Coat. Technol., 76-77, 206 (1995)

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