TiAIN 박막의 우선방위와 내산화성

백창현; 박용권; 위명용; Chang-Hyun Baeg; Yong-Gwon Park; Myeong-Yong Wey

Korean Journal of Materials Research, Vol.12, No.8, 676-681, August, 2002

DOI10.3740/MRSK.2002.12.8.676 Export Citation

TiAIN 박막의 우선방위와 내산화성

Oxidation Resistance and Preferred Orientation of TiAIN Thin Films

백창현^†, 박용권, 위명용

충북대학교 재료공학과

Chang-Hyun Baeg^†, Yong-Gwon Park, and Myeong-Yong Wey

Dept. of Materials Engineering, Chungbuk National University, Chungju 361-763, Korea

E-mail:

Microstructure, mechanical properties, and oxidation resistance of TiAIN thin films deposited on quenched and tempered STD61 tool steel by arc ion plating were studied using XRD, XPS and micro-balance. The TiAIN film was grown with the (200) orientation. The grain size of TiAIN thin film decreased with increasing Al contents, while chemical binding energy increased with Al contents. When hard coating films were oxidized at 850 ? C in air, oxidation resistance of both TiN and TiCN films became relatively lower since the surface of films formed non-protective film such as TiO 2 . However, oxidation resistance of TiAIN film was excellent because its surface formed protective layer such as A 12 O 3 and A l2 Ti 7 O 15 , which suppressed oxygen intrusion.

Keywords:Ti 0.1 Al 0.4 N 0.5;oxidation layer;high Al content;protective layer

[References]

Prengel HG, Santhanam AT, Penich RM, Jindal PC, Wendt KH, Surf. Coat. Technol., 94-95, 597 (1997)
Knotek O, Barimani A, Thin Solid Films, 174, 51 (1989)
Jehn HA, Thiergarten F, Eberbacb H, Fabian D, Surf. Coat. Technol., 50, 45 (1994)
Rebholz C, Leyland A, Matthews A, Thin Solid Films, 343-344, 242 (1999)
Munz WD, Gobel J, Surf. Eng., 3(47) (1987)
McIntyre D, Greene JE, Hakansson G, Sundgren JE, Munz WD, J. Appl. Phys., 67, 1542 (1990)
Ichimura H, J. Surf. Finishing Soc. Jpn., 45, 1090 (1994)
Kawana A, Ichimura H, J. Mining. Mater. Proc. Inst. Jpn., 108, 868 (1992)
Ichimura H, Kawan A, J. Mater. Res., 8, 1093 (1993)
Rebouta L, Vaz F, Andritschky M, da Silva MF, Surf. Coat. Technol., 76-77, 70 (1995)
Woo JW, Lee JK, Lee SR, Lee DB, Oxid. Met., 53, 529 (2000)
Moulder JF, Stickle WF, Sobol PE, Bomben KD : 'Handbook of X-ray Photoelectron Spectros copy', Physical Electonics Inc., 1995 (1995)
Lee IH : Ph. D Thesis, Seoul Nat'l Univ. 1997 (1997)
Palmers J, van Stappen M, Surf. Coat. Tech., 76-77, 363 (1995)
Huang JL, Shew BY, J. Am. Ceramic. Soc., 82(3), 696 (1999)
Jarms C, Stock HR, Mayr P, Surf. Coat. Tech., 108-109, 206 (1998)
Birks N, Meier GH, Introduction to High Temperature Oxidation of Metals (Edward Anold, London, 1988), 72 (1988)
Kim CW, Kim KH, Thin Solid Films, 307(1-2), 113 (1997)
Munz WD, J. Vac. Sci. Technol. A, 4, 2717 (1986)

[Related Articles]

[1] Prengel HG, Santhanam AT, Penich RM, Jindal PC, Wendt KH, Surf. Coat. Technol., 94-95, 597 (1997)

[2] Knotek O, Barimani A, Thin Solid Films, 174, 51 (1989)

[3] Jehn HA, Thiergarten F, Eberbacb H, Fabian D, Surf. Coat. Technol., 50, 45 (1994)

[4] Rebholz C, Leyland A, Matthews A, Thin Solid Films, 343-344, 242 (1999)

[5] Munz WD, Gobel J, Surf. Eng., 3(47) (1987)

[6] McIntyre D, Greene JE, Hakansson G, Sundgren JE, Munz WD, J. Appl. Phys., 67, 1542 (1990)

[7] Ichimura H, J. Surf. Finishing Soc. Jpn., 45, 1090 (1994)

[8] Kawana A, Ichimura H, J. Mining. Mater. Proc. Inst. Jpn., 108, 868 (1992)

[9] Ichimura H, Kawan A, J. Mater. Res., 8, 1093 (1993)

[10] Rebouta L, Vaz F, Andritschky M, da Silva MF, Surf. Coat. Technol., 76-77, 70 (1995)

[11] Woo JW, Lee JK, Lee SR, Lee DB, Oxid. Met., 53, 529 (2000)

[12] Moulder JF, Stickle WF, Sobol PE, Bomben KD : 'Handbook of X-ray Photoelectron Spectros copy', Physical Electonics Inc., 1995 (1995)

[13] Lee IH : Ph. D Thesis, Seoul Nat'l Univ. 1997 (1997)

[14] Palmers J, van Stappen M, Surf. Coat. Tech., 76-77, 363 (1995)

[15] Huang JL, Shew BY, J. Am. Ceramic. Soc., 82(3), 696 (1999)

[16] Jarms C, Stock HR, Mayr P, Surf. Coat. Tech., 108-109, 206 (1998)

[17] Birks N, Meier GH, Introduction to High Temperature Oxidation of Metals (Edward Anold, London, 1988), 72 (1988)

[18] Kim CW, Kim KH, Thin Solid Films, 307(1-2), 113 (1997)

[19] Munz WD, J. Vac. Sci. Technol. A, 4, 2717 (1986)