Korean Journal of Materials Research, Vol.12, No.6, 464-469, June, 2002
메모리 소자에의 응용을 위한 SrBi 2 Nb 2 O 9 박막의 성장 및 전기적 특성
Growth and Characteristics of SrBi 2 Nb 2 O 9 Thin Films for Memory Devices
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SrBi 2 Nb 2 O 9 (SBN) thin films were grown on Pt/Ti/Si and p-type Si(100) substrates by rf-magnetron co-sputtering method using two ceramic targets, SrNb 2 O 6 andBi 2 O 3 . The structural and electrical characteristics have been investigated to confirm the possibility of the SBN thin films for the applications to destructive and nondestructive read out ferroelectric random access memory(FRAM). For the optimum growth condition X-ray diffraction patterns showed that SBN films had well crystallized Bi-layered perovskite structure after 700 ? C heat-treatment in furnace. From this specimen we got remnant polarization (2P r ) of about 6 uC/ cm 2 and coercive voltage (V c ) of about 1.5 V at an applied voltage of 5 V. The leakage current density was 7.6×10 ?7 /A/ cm 2 at an applied voltage of 5V. And for the NDRO-FRAM application, properties of SBN films on Si substrate has been investigated. From transmission electron microscopy (TEM) analysis, we found the furnace treated sample had a native oxide about 2 times thicker than the RTA treated sample and this thick native oxide layer had a bad effect on C-V characteristics of SBN/Si thin film. After 650 ? C RTA process, we got the improved memory window of 1.3 V at an applied voltage of 5 V.
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