Method of synthesis of high-quality thin films of Fe chalcogenides, Fe(Te,Se) and FeSe is studied. By investigating the correlation between T-c and structural parameters, it is concluded that a compressive strain is introduced on the films on CaF2 substrate, which leads to an increase of T, than on oxide substrates. Properties both in the normal state and in the superconducting state are measured. Results are discussed in terms of the possibility of further increasing T-c of this material. (C) 2014 Elsevier B.V. All rights reserved.