Plasma polymerization of aniline is carried out by means of continuous RF and pulsed DC glow discharge plasma in a common reactor at different applied powers. The discharge control variables are optimized for good quality film growth and the role of fragmentation of the molecular structure on the structural, optical, morphological and optophysical properties of the deposited plasma polymerized aniline (PPAni) layers is investigated. Retention of the conjugated structure is found to be prominent at optimum applied power to the plasma in both the continuous RF and pulsed DC polymerization techniques. Improvement in conjugated structure and chain length have been observed in both the continuous RF and pulse DC PPAni thin films with the increase in applied power to the plasma up to a certain limit of applied power when working pressure is fixed at 0.15 mbar. A decrease in optical bandgap with the increase in applied power to the plasma is observed in both the pulsed DC and RF PPAni thin films, but it is more significant in case of RF PPAni films. The plasma polymerized aniline thin films are found to emit photoluminescence due to band to band transition and defects generated in the structure. (C) 2014 Elsevier B.V. All rights reserved.