화학공학소재연구정보센터
Applied Surface Science, Vol.316, 286-291, 2014
Ge2Sb2Te5/SnSe2 nanocomposite multilayer thin films for phase change memory application
By nanocompositing Ge2Sb2Te5 and SnSe2, the electrical and thermal proprieties of Ge2Sb2Te5/SnSe2 multilayer films for phase change random access memory (PCRAM) are better than those of Ge2Sb2Te5 films. The crystallization temperature rises and can be controlled. The resistance gap can reach approximately five orders of magnitude to ensure high data reliability. The activity energy (Ea) is more than 2.60 eV and the temperature for 10 year data retention reach 110 degrees C. The analysis of both XRD patterns and TEM images confirmed the reversible phase change transition between amorphous and crystalline state in Ge2Sb2Te5/SnSe2 nanocomposite multilayer films. According to transient photoreflectance traces, the speed of crystallization process was about 33 ns. Among different Ge2Sb2Te5/SnSe2 multilayer films, the film constitute of [Ge2Sb2Te5(4 nm)/SnSe2(10 nm)](7) showed better properties and was manufactured by CMOS technology to phase change memory (PCM) cells. This result revealed that the Ge2Sb2Te5/SnSe2 nanocomposite multilayer film is a promising phase change material. (C) 2014 Elsevier B.V. All rights reserved.