In this paper, three types of low pressure plasma including hydrogen (HP), oxygen (OP) and nitrogen (NP) treatments have been utilized for the first time to improve DSSCs based on rutile TiO2 array photoanodes. Their effects on the photoanodes and the cell performance have been systematically compared by characterizing the dye loading amount, flat-band potential, donor concentration, electron lifetime and the photovoltaic parameters. Experimental results show that all the three plasma treatments increase the dye loading owing to improved hydrophilicity or enhanced surface roughness. It is found that NP and OP treatments significantly increase the TiO2 donor concentration and decrease trapping sites. By this way, the electron transport is enhanced and the electron recombination is effectively restrained. These comprehensive effects make NP and OP treatments beneficial for the overall performance, by which 13% and 5% increases in efficiency are achieved. However, HP treatment causes obvious reduction in the donor concentration and more severe electron recombination, which decreases the efficiency by about 15%. (C) 2014 Elsevier B.V. All rights reserved.