Dense electrolyte and porous cathode coatings by room-temperature operating aerosol deposition process are applied and optimized for metal-supported solid oxide fuel cell fabrication. Porous metal support of FeCr-based alloy including (La, Sr)TiO3 diffusion barrier and (Ce, Gd)O2-delta-Ni anode were prepared using tape-casting process and co-fired in reducing atmosphere. Dense (Zr, Y)O2-delta electrolyte and porous (La, Sr)(Co, Fe)O3-delta cathode were prepared using aerosol deposition on it. The La0.2Sr0.8TiO3 diffusion barrier effectively suppressed the reaction between the FeCr-based alloy support and Ni in the anode during co-firing at 1300 degrees C. Room-temperature deposition of the electrolyte and cathode layers in low vacuum conditions effectively prevented metal support degradation and cathode decomposition. Microstructural analysis of the anode, electrolyte, and cathode layers is presented. An open circuit voltage of 1.08 V and maximum power density of 0.71 W/cm(2) were achieved at 750 degrees C. Copyright (C) 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.