CaZr0.3Y0.1O3-delta (CZY) films were fabricated by chemical solution deposition (CSD) from ethanol-based liquid solutions. The films were deposited on single crystals of yttria-stabilized zirconia (YSZ) in (100), (110) and (111) crystallographic orientations. The structural, mechanical and electrical properties of the films have been studied by means of Xray diffraction (XRD), scanning electron microscopy (SEM), and nanoindentation and impedance spectroscopy methods. XRD and SEM results have shown that the films were polycrystalline. Effect of the substrate orientation on the microstructural, mechanical and electrical properties of CZY films has been examined. The films deposited on (110)-substrates consist of the largest grains; show the highest values of hardness and electrical conductivity. Conductivity of CZY film on (110)-substrates increases with rise in humidity which proves proton transport in the films. Copyright (C) 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.