화학공학소재연구정보센터
Journal of Crystal Growth, Vol.415, 1-6, 2015
In-situ photoluminescence measurements during MOVPE growth of GaN and InGaN MQW structures
In this work we report the First quasi-continuous in-situ photoluminescence study of growing InGaN LED structures inside an industrial-grade metal-organic vapor phase epitaxy (MOVPE) reactor at growth temperature. The photoluminescence spectra contain information about temperature, thickness and composition of the epitaxial layers. Furthermore, the in-situ spectra - even at an early stage of the growth of the active region - can be used to predict the photoluminescence emission wavelength of the structure at room temperature. In this study an accuracy of this predicted wavelength in the range of +/- 1.3 nm (2 sigma) is demonstrated. This technique thus appears suitable for closed-loop control of the emission wavelength of InGaN LEDs already during growth. (C) 2015 The Authors. Published by Elsevier B.V.