Using only a nonheating sputtering method, all-solid-state thin-film lithium-ion rechargeable batteries composed of a Li2Mn2O4 positive electrode, Li4Ti5O12 negative electrode, and Li3PO4-xNx electrolytewere fabricated, and the stability of their electrochemical characteristics and microstructures toward charge-discharge cycling was investigated. The charge-discharge curve retained a stable S-shaped profile for the batteries with a thinner negative electrode layer, while it changed from an S-shaped profile to a two-step profile for the batteries with a thicker negative electrode layer. Transmission electron microscopy (TEM) confirmed that the diffraction rings assigned to a LiMn2O4 spinel structure sharpened after charge-discharge cycling, suggesting that more crystalline grains increased in the positive electrode during cycling. On the other hand, it was found that the shape of the interfaces of each layer was sharp and clear, and each layer nearly retained its initial structure after 100 charge-discharge cycles. Moreover, the batteries displayed stable cycle performance over more than 10000 charge-discharge cycles. The present low-temperature fabrication process may represent a great advancement in practical battery production. (C) 2014 The Electrochemical Society. All rights reserved.