Thin poly(acrylic acid) PAA films were deposited by pulsed plasma polymerization on different organic and inorganic substrates. The structure-property relationships of the deposited acrylic acid polymers were studied in dependence on the monomer pressure by various techniques and probes. The surface and bulk properties of the plasma deposited films were investigated by X-ray photoelectron spectroscopy, attenuated total reflection infrared, and broad band dielectric spectroscopy. The experimental infrared frequencies of PAA films are compared with those predicted from quantum mechanical calculation. The concentration of the COOH groups in the film (stored in ambient air) decreased by about 15 % compared to the as-prepared sample. The plasma deposited PAA probably form a highly branched product. However, the dielectric measurements show that in addition to the hydrogen bonds, self condensation process was able to hinder the localized fluctuation as well. These processes lead to form a cross-linked network polymer film. Nevertheless, a low energy is sufficient to break these processes during heating at atmospheric pressure. Therefore, homogenized samples with free branches (functional group) were obtained after a first heating with structures close to conventional polymerized acrylic acid. Thus, a thermally stable product was obtained.