Highly oriented LiFePO4 thin-film electrodes were fabricated via chemical solution deposition combined with spin coating. The effects of the precursor concentrations and types of substrates on microstructures and electro-chemical performances were studied. Single-phase LiFePO4 with orientations perpendicular to the (211)/(020) and (311) planes prepared using stainless steel as substrate presents the capacity of 4.9 mu Ah.cm(-2) and the apparent activation energy of 59.2 kJ.mol(-1), indicating its great potential to be used as cathode material for lithium thin film batteries. (C) 2014 Elsevier B.V. All rights reserved.