A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte-insulator-semiconductor sensor with a double-stacked membrane annealed at 800 degrees C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications. (C) 2014 Elsevier B.V. All rights reserved.