Gamma-Fe2O3 and Fe2O3:Tb films are grown on quartz substrate by RF magnetron sputtering deposition. (220) preferred Fe2O3 film is textured with pyramid and inverted pyramid, and its magnetic anisotropy is studied. Amorphous Fe2O3:Tb films are also fabricated and spin-glass behavior is found. Using Faraday rotation measurement, magneto-optical properties of various Fe2O3 films are studied, and it is found that the magneto-optical activity could be enhanced in the Tb-implanted gamma-Fe2O3 films and gamma-Fe2O3/SiO2 complex films. Moreover, Large Verdet constants are found in the Fe2O3:Tb(10%) and Fe2O3:Tb(10%)/SiO2 complex films. (C) 2014 Elsevier B.V. All rights reserved.