Thin Solid Films, Vol.571, 321-324, 2014
Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
Diffractive optics for hard X-rays feature superior properties in terms of resolution and efficiency, if volume diffraction effects are exploited all-over the aperture. For multilayer Laue lenses, preferably a wedged geometry is required to obtain this effect. We present an approach utilizing an additional stress layer to realize the necessary geometrical modifications where each lens can be customized to a selected photon energy independently of the given multilayer deposition. The quality of the deposition of the stress layer is evaluated using a laboratory X-ray microscope prior to its application at synchrotron radiation facilities with a special approach to measure the relative layer tilt at high spatial resolution. (C) 2014 Elsevier B. V. All rights reserved.
Keywords:X-ray optics;Diffractive optics;X-ray microscopy;Multilayers;Stress layer;Sputter deposition;Focused ion beam