Platinum, palladium and silver films with different microstructures have been prepared on differently orientated yttrium-stabilised zirconia (YSZ) substrates by pulsed laser deposition and then annealed at temperatures between 200 degrees C and 850 degrees C. Thereby, an influence of the type of metal, of the microstructure of the as-prepared film and of the orientation of the substrate on the annealing behaviour could be determined. The following annealing effects were observed for platinum, palladium and silver films: i) sharpening of the film boundary, ii) smoothing of the film surfaces, iii) sharpening of the texture [thereby: reduction of the fraction of small angle and twin grain boundaries], iv) grain growth and accordingly reduction of the fraction of grains as well as v) grooving at grain boundaries, vi) void formation at the metal vertical bar YSZ-interface, vii) hole formation within the films and viii) reduction of the fraction of droplets. In the case of palladium films also ix) oxidation [between 300 degrees C <= T < 750 degrees C] and stronger de-wetting phenomena than for platinum [with x) waving of the film and xi) island formation at T >= 750 degrees C] have been found. Silver films are not oxidised, but show stronger de-wetting phenomena than platinum and palladium, with xi) island formation and xii) evaporation of the silver at T >= 550 degrees C. Interestingly, silver films on (111) orientated YSZ are thermally much more stable than silver films on the other orientated substrates up to 750 degrees C. The annealing effects were described by interface, grain boundary and surface energy minimization. (C) 2014 Elsevier B.V. All rights reserved.