화학공학소재연구정보센터
Thin Solid Films, Vol.575, 30-33, 2015
Technological solution for the automatic replacement of the catalytic filaments in HWCVD
The degradation of the catalytic filaments is the main factor limiting the industrial implementation of the hot wire chemical vapor deposition (HWCVD) technique. Up to now, no solution has been found to protect the catalytic filaments used in HWCVD without compromising their catalytic activity. Probably, the definitive solution relies on the automatic replacement of the catalytic filaments. In this work, the results of the validation tests of a newapparatus for the automatic replacement of the catalytic filaments are reported. The functionalities of the different parts have been validated using a 0.2 mm diameter tungsten filament under mu c-Si: H deposition conditions. (C) 2014 Elsevier B.V. All rights reserved.