The decomposition of tri-methyl aluminum(TMA) by various catalytic alloys is investigated to find low cost and oxidation-resistive catalyzers for preparation of alumina films by catalytic chemical vapor deposition (Cat-CVD) method. It is found that the temperature to decompose TMA in catalytic decomposition process decreases in the temperature region below 500 degrees C with associated reduction in activation energy as chromium (Cr) contents in catalytic alloys increase. It is also found that the density of decomposed species increases as nickel (Ni) contents in alloys increase. It has been confirmed fromalumina film formation experiments using various alloy catalyzers that the growth rate of films increases as Ni contents included in the catalytic alloys increase. (C) 2014 Elsevier B. V. All rights reserved.