열화학증착법으로 제조된 SnO 2   박막의 특성

류득배; 이수완; D.B. Ryu; S.W. Lee

Korean Journal of Materials Research, Vol.11, No.1, 15-19, January, 2001

Export Citation

열화학증착법으로 제조된 SnO 2 박막의 특성

Characterization of SnO 2 Thin Films Prepared by Thermal-CVD

류득배, 이수완

선문대학교 재료공학과

D.B. Ryu, and S.W. Lee

Department of Materials Science and Engineering, Sun Moon University, 100, Kalsan-ri, Tangjeong-myeon, Asann, Chungnam, 336-840, Korea

초록

유리기판 위에 열화학증착법으로 투명전도성 산화주석막을 제조하였다. 박막은 원료물질로 tetramethyltin(TMT), 산화제로 산소나 오존이 포함된 산소의 혼합물로부터 제조되었다 제조된 박막은 기판온도에 따라 물성이 크게 변하였고 최적화된 박막은 TMT 유랑 8 sccm, 산소유량 150 sccm, 기판온도 380 ? C 에서 제조되었다. 오존을 사용함으로서 기판온도를 약 180 ? C 정도 낮출 수 있었고 비저항은 ~ 10 ?2 Ωcm 에서 ~ 10 ?3 Ωcm 으로 감소시킬 수 있었다.

Transparent and conducting tin oxide thin films were prepared on soda lime silicate glass by thermal chemical vapour deposition. Thin films were fabricated from mixtures of tetramethyltin (TMT) as a precursor, oxygen or oxygen containing ozone as an oxidant. The properties of fabricated tin oxide films are highly changed with variations of substrate temperature. Optimized thin films could be prepared on TMT, which flow rate of 8 sccm, oxygen flow rate of 150 sccm and substrate temperature of 38 0 ? C . We reduced deposition temperature about 180 ? C by using of oxygen containing ozone instead of pure oxygen and resistivity of thin films was decreased from ~ ×10 ?2 Ωcm to ~ ×10 ?3 Ωcm.

Keywords:Tin Oxide;TMT;Ozone;CVD;transparent and conducting films

[References]

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[1] Aegerter MA, et al., J. Non-Cryst. Solids, 218, 123 (1997)

[2] Suzuki K, Mizuhashi M, Thin Solid Films, 97, 119 (1998)

[3] Mooney JB, Reading SB, Ann. Rev Mater. Sci., 12, 81 (1982)

[4] Vetron J, Chung YW, J. Vac. Sci. Technol. A, 9, 3014 (1991)

[5] Shanti E, Banerjee A, Dutta V, Chopra KL, J. Applied Physics, 53, 1615 (1982)

[6] Shanon G, Rup R, Mansingh A, Thin Solid Films, 190, 287 (1990)

[7] Hartnagel HL, Dawar AL, Jain AK, Jagadish C, 'Semiconducting Transparent Thin Films', IOP publishing Ltd (1995) (1995)

[8] Madsen JM, Cui Z, Takoudis CG, J. Applied Physics, 87, 2046 (2000)

[9] Suzuki RO, Ogawa T, Ono K, J. Am. Ceram. Soc., 82, 2033 (1999)

[10] Lee SW, Yoon C, Park JI, Park KJ, J. Kor. Vac. Soc., 8, 201 (1999)

[11] Haacke G, J. Appl. Phy., 47, 64086 (1976)

[12] Simonis F, Leij MV, Hoogendoorn CJ, Solar Energy Mater., 1, 221 (1979)

[13] Abeles F, 'Optical properties of solids', Amsterdam : North-Holland (1972) (1972)

[14] Yusta FJ, et al., J. Mater. Chem., 7, 1421 (1997)