화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Materials Research, Vol.11, No.1, 39-43, January, 2001
Export Citation
조성변화에 따른 Fe-Sm-O계 박막의 연자기적 성질
Influence of Composition on Soft Magnetic Properties of As-Deposited Fe-Sm-O Thin Films
윤대식, 조완식1, 고은수, 이영, 박종봉, 김종오
  • 충남대학교 공과대학 재료공학과
  • 1고기능성 자성재료 연구센터
T.S. Yoon, W.S. Cho1, E.S. Koo, Ying Li, J.B. Park, and C.O. Kim
  • Division of Materials Engineering, Chungnam National University, Taejeon 305-764, Korea
  • 1Research Center for Advanced Magnetic Materials, Taejeon 305-764, Korea
초록
초미세결정립 Fe-Sm-O계 연자성박막을 Ar+O2혼합가스 분위기에서 산소분압을 5%로 고정하고 Sm2O3dml chip수를 변화시켜 RF magnetron sputtering 법으로 제조하였다. 가장 우수한 연자기적 특성을 보이는 Fe Sm O 박막은 포화자속밀도 18KG, 보자력 0.82 Oe, 실효투자율(0.5~100 MHz) 2,600의 연자성을 나타내었다. Fe-Sm-O계 박막의 전기비저항은 Sm-oxide의 함량이 증가할수록 증가하는 경향을 나타내었으며, Fe Sm O 박막의 전기비저항은 약 130 였다. Fe-Sm-O계 박막의 미세구조는 Sm-oxide의 함량이 적은 경우에는 a-Fe 결정상에 Sm-oxide가 석출된 형태로 나타났으나, Sm-oxide의 함량이 증가할수록 a-Fe 결정상과 Sm-oxide 비정질의 혼합구조로 변화하였다. Fe의 조성이 약72~94 at퍼센트인 Fe-Sm-O계 박막의 성능지수는 50 MHz까지 약 7~75의 값을 나타내었다.
Nanocrystalline Fe-Sm-O thin films were prepared by RF magnetron reactive sputtering method in Ar+O 2 mixed atmosphere with the O 2 content of 5%. The compositions of the thin films were changed by changing the number of Sm 2 O 3 chips. The best soft magnetic properties of the thin film with the composition of Fe 83.4 Sm 3.4 O 13.2 were saturation flux density of 18 kG, coercivity of 0.82 Oe and effective permeability about 2,600 at 0.5~100 MHz, respectively. The electrical resistivity of Fe-Sm-O thin films was increased with increasing the amount of Sm and O elements which combined each other, the electrical resistivity of Fe 83.4 Sm 3.4 O 13.2 thin film was 130μΩcm . In case of the small amount of Sm and O elements, the microstructures of Fe-Sm-O thin films showed a precipitated phase of Sm 2 O 3 on the α?Fe phase. With the increase of the amount of Sm and O elements, the microstructures of the Fe- Sm-O thin films were changed into a mixed structure of α?Fe crystal-phase and Sm-oxide amorphous phase. The Fe-Sm-O thin films with Fe content in the range of 72~94 at% exhibited the quality factor (Q = μ ′/ μ ") of 7~75 up to 50 MHz.
Keywords:thin films;soft magnetic;resistivity
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