(Fe 0.6 Co 0.4 ) 89   {Zr_{11} / (Fe 1?x Co x )  Zr 11   (x=0, 0.6, 0.9)비정질 다층박막의 자기특성

김상원; Sang Won Kim

Korean Journal of Materials Research, Vol.10, No.10, 709-714, October, 2000

Export Citation

(Fe 0.6 Co 0.4 ) 89 {Zr_{11} / (Fe 1?x Co x ) Zr 11 (x=0, 0.6, 0.9)비정질 다층박막의 자기특성

Magnetic Properties of (Fe 0.6 Co 0.4 ) 89 {Zr_{11} / (Fe 1?x Co x ) Zr 11 (x=0, 0.6, 0.9)Amorphous Multilayers

김상원

포항산업과학연구원 재료공정연구센터 금속·코팅재료연구팀

Sang Won Kim

Electromagnetic Materials Laboratory, Advanced Materials Div., Research Institute of Industrial Science & Technology(RIST), 790-600 Pohang, Korea

초록

SAW 소자에 응용 가능한 자성박막재의 개발을 목적으로 RF 스퍼터링법으로 증착한 (Fe(sub)0.6Co(sub)0.4)(sub)89Zr(sub)11/Fe(sub)1-xCo(sub)x)Zr(sub)11(x=0, 0.6, 0.9) 비정질 다층박막의 자기특성을 조사하였다. 수직자기장중열처리를 행하였을 때 상온에서 비자성 Fe(sub)89Zr(sub)11 층의 삽입에서만 다층박막화의 효과가 나타났다. 일 예로 (Fe(sub)0.6Co(sub)0.4)(sub)89Zr(sub)11(30 \AA )/Fe(sub)89-Zr(sub)11(40 \AA ) 박막시편에 1kHz, 50 mOe의 여기자기장으로 평가된 최대 미분투자율 μ (sub)d.max는 단층막의 750에서 1650으로 2배 이상 증가, 구동 바이어스자기장 Hw는 20 Oe에서 6Oe로 3배 이하로 감소하는 양호한 특성이 얻어졌다. 그러나 다른 중용 특성인 자왜는 34% 정도 감소하는 것으로 추정되었다.

Magnetic properties of (Fe0.6 Co 0.4) Zr 11 / (Fe1- xCox) Zr 11 (X=0, 0.6, 0.9) amorphous multialyers favricaated by RF sputtering method have been investigated as a function of the thickness of (Fe1 - x Co x) Zr 11 layer. In an exciting field of 50 mOe at the frequency of 1 kHz, good differential permeability propertires were obtaioned via a perpendicular magnetic field annealing. was 1650 and Hw was 6 Oe, which improved to twice higher and three times lower values than those of (Feo.6 Co 0.4) Zr 11 monolayer, respectively. However the magnetistriction constant of (Fe 0.5 Co0.4) Zr 11 monolayer. It is thought that such behavior is due to the mutilayered effect by means of insertion of nonmagnetic layer at room temperature.

Keywords:SAW;amorphous multilayer;differential permeability

[References]

Webb DC, Forester DW, Ganguly AK, Vittoria C, IEEE. Trans. Mag., Mag-15, 1410 (1979)
Ganguly AK, Davis KL, Webb DC, Vittoria C, Forester DW, Electron. Lett., 11, 610 (1975)
Forester DW, Vittoria C, Webb DC, Davis KL, J. Appl. Phys., 49, 1794 (1978)
Simpson EM, Robbins WP, IEEE. Trans. Mag, Mag-16, 919 (1980)
Yamaguchi M, Hashimoto KY, Kogo K, Naoe M, IEEE. Trans. Mag., Mag-16, 916 (1980)
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김상원, 김찬욱, 한국재료학회지, 7(12), 1083 (1997)
김상원, 한국재료학회지, 9(8), 831 (1999)
Fukamichi K, Shirakawa K, Kaneko T, Masumoto T, Steeb S(ed.), Warlimont H(ed.)Rapidly Quenched Metals/ pp.1165, 1985 (1985)
Ohnuma S, Shirakawa K, Nose M, Masumoto T, IEEE. Trans. Mag., Mag-16, 1129 (1980)
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Fujimori H, Morita H, Yamamoto M, Zhang J, IEEE. Trans. Mag., Mag-22, 1101 (1986)
太田惠造磁氣工學の基礎/ 共工出版社, pp.400, 1973 (1973)

[Referenced By]

[1] Webb DC, Forester DW, Ganguly AK, Vittoria C, IEEE. Trans. Mag., Mag-15, 1410 (1979)

[2] Ganguly AK, Davis KL, Webb DC, Vittoria C, Forester DW, Electron. Lett., 11, 610 (1975)

[3] Forester DW, Vittoria C, Webb DC, Davis KL, J. Appl. Phys., 49, 1794 (1978)

[4] Simpson EM, Robbins WP, IEEE. Trans. Mag, Mag-16, 919 (1980)

[5] Yamaguchi M, Hashimoto KY, Kogo K, Naoe M, IEEE. Trans. Mag., Mag-16, 916 (1980)

[6] Hashimoto KY, Yamaguchi M, Kogo H, Naoe M, IEEE. Trans. Mag, Mag-16, 3181 (1981)

[7] 김상원, 김찬욱, 한국재료학회지, 7(12), 1083 (1997)

[8] 김상원, 한국재료학회지, 9(8), 831 (1999)

[9] Fukamichi K, Shirakawa K, Kaneko T, Masumoto T, Steeb S(ed.), Warlimont H(ed.)Rapidly Quenched Metals/ pp.1165, 1985 (1985)

[10] Ohnuma S, Shirakawa K, Nose M, Masumoto T, IEEE. Trans. Mag., Mag-16, 1129 (1980)

[11] Obi Y, Wang LC, Motsay R, Onn DG, Nose M, J. Appl. Phys., 53, 2304 (1982)

[12] 深道化明日本應用磁氣學會第36回硏究會資料/ v.36-3, pp.19, 1980 (1980)

[13] Herman DA, Jr., Argyle BE, Trouilloud PL, Petek B, Romankiw LT, Andricacos PC, Krongelb S, Lath DL, Canaperi DF, Komsa ML, J. Appl. Phys., 63, 1036 (1988)

[14] Slonczewski JC, Petek B, Argyle BE, IEEE. Trans. Mag., Mag-24, 2045 (1988)

[15] 光岡勝也;須藤修二;成重眞治;삼전선 日本應用硏氣學會誌/ v.12, pp.335, 1988 (1988)

[16] Fujimori H, Morita H, Yamamoto M, Zhang J, IEEE. Trans. Mag., Mag-22, 1101 (1986)

[17] 太田惠造磁氣工學の基礎/ 共工出版社, pp.400, 1973 (1973)