마모 상대재 변화에 따른 TiN 극박막의 마찰 및 마모거동

송명훈; 이재갑; 김용석; Myoung-Hun Song; Jae Gab Lee; Yong-Suk Kim

Korean Journal of Materials Research, Vol.10, No.1, 62-68, January, 2000

Export Citation

마모 상대재 변화에 따른 TiN 극박막의 마찰 및 마모거동

Friction and Wear Behavior of Ultra-Thin TiN Film during Sliding Wear against Alumina and Hardened Steel

송명훈, 이재갑 , 김용석

국민대학교 금속재료공학부

Myoung-Hun Song, Jae Gab Lee , and Yong-Suk Kim

School of Metallurgical and Material Engineering, Kookmin University, Seoul, 136-702, Korea

초록

Reactive DC magnetron sputtering 법으로 AISI 304 스테인레스강 기판 위에 TiN 극박막을 50nm∼700nm 두께로 증착한 후, 경화된 AISI 52100 강과 알루미나를 마모 상대재로 하여 박막의 미끄럼마모 시험을 상온 대기 중에서 행하고, 마모 상대재에 따른 TiN 극박막의 마찰과 마모 거동을 연구하였다. AISI 52100 강구를 마모 상대재로 한 경우, TiN 박막은 200g 이하의 마모 하중과 0.035m/sec의 낮은 미끄럼 속도 조건에서 500nm 내외의 극박으로도 마찰계수가 0.1 내외로 유지되는 우수한 내마모성을 보였다. 이같이 우수한 내마모성은 AISI 52100 강으로부터 천이된 Fe가 산화되어 TiN 박막 표면에 Fe 산화층을 형성한 때문으로 설명되었다. 그러나, 마모 상대재를 알루미나 볼로 한 경우에는 TiN 박막 위에 산화층이 형성되지 않고, 마모가 거의 되지 않는 알루미나 볼과 박막층 사이에 국부적 응력집중 등이 발생하여 시험된 전 조건 하에서 박막층의 박리 현상이 관찰되었고 높은 마찰계수가 측정되었다. 또한 기판의 평균 표면조도, Ra가 박막의 두께와 유사할 때 마찰계수가 급격히 상승하는 현상이 관찰되었다.

Ultra thin TiN films (50∼700nm thickness) were deposited on AISI 304 stainless steel substrates using a reactive DC magnetron sputtering deposition process to investigate their wear and friction properties. Dry sliding wear tests of the films were carried out against hardened steel and alumina counterparts using a pin-on-disk type wear tester at room temperature. Variation of friction coefficient was measured as a function of film thickness, load, sliding speed and roughness of the substrate. Worn surfaces of the film were examined by a scanning electron microscope. Wear resistance of the TiN film increased with the increase of the film thickness. The TiN film showed relatively high wear resistance in spite of its ultra thin thickness when it is mated by the steel counterpart, while it showed poor wear resistance with the alumina counterpart. The good wear resistance with the steel counterpart was explained by the formation of oxide layers on the film surface and sound interface character between the ultra thin film and the substrate.

Keywords:wear;thin films;sliding wear;nitrides;TiN;PVD

[References]

Pamler W, Huttinger M, Bensch W, Thin Solid Films, 174, 143 (1989)
Arezzo F, Gimondo P, Hashimoto M, Ono N, Takahashi T, Thin Solid Films, 290-291, 226 (1996)
Gun YY, Lin JF, Ai CF, Wear, 194, 12 (1996)
Shieu FS, Sung YC, Cheng LH, Huang JH, Yu GP, Corrosion Science, 39(5), 893 (1997)
Kim HD, Cho SS, J. Kor. Inst. Surf. Eng., 31(1), 34 (1998)
Choi JY, Nam OH, Lee IW, Kim MI, J. Kor. Inst. Met. Mater, 32(32), 196 (1994)
Shin HS, Han JK, Chang HK, Koh KJ, J. Kor. Inst. Surf. Eng., 27(1), 36 (1994)
Kim HY, Beak WS, Kwon SC, Kim KH, J. Kor. Inst. Surf. Eng., 26(5), 225 (1993)
NavinSek B, Panjan P, Krusic J, Thin Solid Film, 98, 809 (1998)
Sproul WD, Thin Solid Films, 107, 141 (1983)
Hochman RF, Erdemir A, Dolan FJ, Thom RL, Vac. Sci. Technol. A, 3(6), 2348 (1985)
Hedenquist P, Olsson M, Soderberg S, Wear, 130, 123 (1989)
Cheng HS, Chang TP, Sproul WD, Dowson D, Taylor CM, Godet M, Mechanics of Coating, 81 (1989)
Su YL, Yao SH, Leu ZL, Wei CS, Wu CT, Wear, 213, 165 (1997)
Yoon KJ, Cho SJ, Kim SS, Yoon MS, Yang SH, Wear, 170, 101 (1993)
Sander H, Petersohn D, Dowson D, et al., Thin Films in Tribology/ Elsevier, 483 (1993)
Singer IL, Fayeulle S, Ehni PD, Wear, 149, 375 (1991)
Vancoille E, Celis JP, Roos JR, Wear, 165, 41 (1993)
Sirvio EH, Sulonen M, Sundquist H, Thin Solid Films, 96, 93 (1982)

[Related Articles]

[1] Pamler W, Huttinger M, Bensch W, Thin Solid Films, 174, 143 (1989)

[2] Arezzo F, Gimondo P, Hashimoto M, Ono N, Takahashi T, Thin Solid Films, 290-291, 226 (1996)

[3] Gun YY, Lin JF, Ai CF, Wear, 194, 12 (1996)

[4] Shieu FS, Sung YC, Cheng LH, Huang JH, Yu GP, Corrosion Science, 39(5), 893 (1997)

[5] Kim HD, Cho SS, J. Kor. Inst. Surf. Eng., 31(1), 34 (1998)

[6] Choi JY, Nam OH, Lee IW, Kim MI, J. Kor. Inst. Met. Mater, 32(32), 196 (1994)

[7] Shin HS, Han JK, Chang HK, Koh KJ, J. Kor. Inst. Surf. Eng., 27(1), 36 (1994)

[8] Kim HY, Beak WS, Kwon SC, Kim KH, J. Kor. Inst. Surf. Eng., 26(5), 225 (1993)

[9] NavinSek B, Panjan P, Krusic J, Thin Solid Film, 98, 809 (1998)

[10] Sproul WD, Thin Solid Films, 107, 141 (1983)

[11] Hochman RF, Erdemir A, Dolan FJ, Thom RL, Vac. Sci. Technol. A, 3(6), 2348 (1985)

[12] Hedenquist P, Olsson M, Soderberg S, Wear, 130, 123 (1989)

[13] Cheng HS, Chang TP, Sproul WD, Dowson D, Taylor CM, Godet M, Mechanics of Coating, 81 (1989)

[14] Su YL, Yao SH, Leu ZL, Wei CS, Wu CT, Wear, 213, 165 (1997)

[15] Yoon KJ, Cho SJ, Kim SS, Yoon MS, Yang SH, Wear, 170, 101 (1993)

[16] Sander H, Petersohn D, Dowson D, et al., Thin Films in Tribology/ Elsevier, 483 (1993)

[17] Singer IL, Fayeulle S, Ehni PD, Wear, 149, 375 (1991)

[18] Vancoille E, Celis JP, Roos JR, Wear, 165, 41 (1993)

[19] Sirvio EH, Sulonen M, Sundquist H, Thin Solid Films, 96, 93 (1982)