The effect of annealing on the anomalous Hall effect (AHE) in perpendicular Co/Pt multilayers sandwiched by HfO2 layers has been studied. It was found that thermally stable AHE features can be obtained in perpendicular Co/Pt multilayers with the introduction of two Co/HfO2 interfaces, leading to the improvement of the skew scattering contribution to the AHE after annealing. On the contrary, thermally stable AHE behavior cannot be observed in Co/Pt multilayers sandwiched by Pt layers or MgO layers because of Co-Pt interdiffusion during annealing. (C 2015 Elsevier B.V. All rights reserved.