Applied Surface Science, Vol.364, 837-842, 2016
Fabrication and reducing gas detection characterization of highly-crystalline p-type zinc chromite oxide thin film
A p-type ternary ZnCr2O4 (ZCO) thin film was fabricated using rf sputtering on a sapphire substrate. Microstructural analyses revealed that the ZCO thin film had a high crystalline quality. Surface morphology investigations showed that the ZCO film had a rugged surface because of a distinct columnar grain feature. A gas sensor composed of the ZCO thin film exhibited marked acetone and NH3 gas-sensing responses. These acetone and NH3 gas -sensing responses reached an optimal value at operating temperatures of 250 degrees C and 300 degrees C, respectively. The ZCO sensor showed satisfactory repeatability when operated under dynamic conditions. The stable gas -sensing behavior of the p-type ZCO thin film to acetone and NH3 gases broadens the design of oxide gas sensors incorporated with this ternary oxide. (C) 2016 Elsevier B.V. All rights reserved.