Single-layered Fe52Pt48 films with thickness of 10 nm were sputter-deposited on glass substrates. Rapid thermal annealing with different heating rates (10-110 K/s) was applied to transform as-deposited fcc phase into L1(0) phase and meanwhile to align [0 0 1]-axis of L1(0) crystal along plane normal direction. Based on X-ray diffractometry using synchrotron radiation source, the texture coefficient of (0 0 1)-plane increases with increasing heating rate from 10 to 40 K/s, which is correlated with perpendicular magnetic anisotropy and in-plane tensile stress analyzed by asymmetric sin(2) psi method. Furthermore, it was revealed by atomic force microscopy that the dewetting process occurred as heating rate was raised up to 80 K/s and higher. The change in the microstructure due to stress relaxation leads to the degradation of (0 0 1) orientation and magnetic properties. Surface roughness is closely related to the in-plane tensile stress. Enhanced perpendicular magnetic anisotropy and atomically flat surface were achieved for the samples annealed at 40 K/s, which may be suitable for further practical applications. This work also suggests a feasible way for surface engineering by controlling internal stress of the FePt without introducing cap layer. (C) 2015 Elsevier B.V. All rights reserved.