Anatase-containing TiO2 layers were formed on commercially pure (CP) Ti and Ti-25mass%Mo (Ti-25Mo) and Ti-25mass%Nb (Ti-25Nb) alloys by two-step thermal oxidation. The first-step treatment was conducted in an Ar-1%CO atmosphere at 1073K for 3.6 ks, and the second-step treatment was conducted in air at 673-1073 K for 10.8 ks. The second-step temperature range for anatase formation was wider in the Ti alloys than in CP Ti. Photo-induced superhydrophilicity under UV irradiation was observed for the TiO2 layers with anatase fractions >= 0.6 on CP Ti and the Ti-25Mo alloy, and with anatase fractions >= 0.18 on the Ti-25Nb alloy. The TiO2 layers on the Ti-25Nb alloy exhibited excellent photocatalytic activity in the low anatase fraction region, which is considered to be caused by the incorporation of 1-3 at% Nb into the TiO2 layers. The rate constant of methylene blue degradation showed maxima at anatase fractions of 0.6-0.9. (C) 2015 Elsevier B.V. All rights reserved.