The characteristics of fracture by cavitation in superplastic materials are reviewed. Particular attention is paid to the theoretical developmental aspects of cavity nucleation, cavity growth and cavity interlinkage. Various factors, including grain boundary sliding, impurity atoms or particles, phase proportion, deformation temperature, strain rate, strain and grain size, are discussed. Finally, methods for controlling cavitation during superplastic deformation are summarized, and problems which require further work are also presented.