Five different types of SiC fibre produced by chemical vapour deposition were analysed using Auger electron spectroscopy (AES), scanning electron microscopy (SEM) and X-ray (WDX) analysis. Fibres studied include SCS0, SCS6, Sigma SM1240 and two types of SIC fibres denoted SAM1 and SAM2, produced in the Commonwealth of independent States (Ukraine, former USSR). Fibres were fractured in situ in the Auger spectrometer. For each fibre, the oxygen, carbon and silicon yields were measured and qualitative assessment of oxygen was performed. Results suggest that the SCS0 fibre contains less oxygen than other SIC fibres. It was revealed that the SAM1 fibre (120 mu m diameter) has a duplex SiC and carbon coating deposited over a 20 mu m tungsten core prior to the main SIC deposition, to decouple mechanically the tungsten core from the main SiC deposition.