화학공학소재연구정보센터
Journal of Materials Science, Vol.31, No.1, 192-198, 1996
Soft-X-Ray Image Storage in Poly (Methyl-Methacrylate)
Images stored in resist for soft X-ray lithography or microradiography were found to show a background noise which limits the resolution. This is due to the statistically variable spatial distribution of the photons incident on the resist surface. An estimate of the fundamental noise-limited resolution has been made from the experimental measurement of photon flux incident on the surface and the accurate development rate curves. Monochromatic radiation from a synchrotron source was used.