Silicon polymer, polymethylsilane, as a SiC precursor was synthesized and then mixed with metal compounds. They were converted to various ceramic composites on heating to temperature 1450℃. ultrasonic suspension of 7wt% or l5wt% Mo metal powder in PMS and the mixture of 3wt% MoCl₅ and PMS were transformed to pure SiC/MoSi₂ ceramics. However, when used Mo(CO)₆ as a Mo source, the mixtures of SiC, small amount MoSi₂, and other phases were produced