화학공학소재연구정보센터
Journal of Crystal Growth, Vol.439, 104-109, 2016
Development of III-Sb metamorphic DBR membranes on InP for vertical cavity laser applications
Sb-based metamorphic DBR membranes are developed for InP-based vertical cavity laser applications. The reflectivity of the metamorphic DBR membrane is compared to the reflectivity of a lattice-matched DBR to characterize the optical quality of the DBR membrane. The metamorphic interface between InP and the Ill-antimonides is found to degrade the reflectivity of the DBR. Therefore, the growth temperature for the metamorphic DBR is optimized in order to obtain highly reflective ( > 99.8%) III-Sb thin-film membranes. (C) 2016 Elsevier B.V. All rights reserved.