Ultra-thin MFI membranes were for the first time evaluated for air separation at low feed pressures ranging from 100 to 1000 mbar at cryogenic temperature. The membrane separation performance at optimum temperature at all investigated feed pressures was well above the Robeson upper bound for polymeric membranes at near room temperature. The O-2/N-2 separation factor at optimum temperature increased as the feed pressure was decreased and reached 5.0 at 100 mbar feed pressure and a membrane temperature of 67 K. The corresponding membrane selectivity was 6.3, and the O-2 permeance was as high as 8.6 x 10(-7) mol m(-2) s(-1) Pa-1. This permeance was about 100 times higher than that reported for promising polymeric membranes. The membrane selectivity and high O-2 permeance was most likely a result of O-2/N-2 adsorption selectivity. The increase in O-2/N(N)2 separation factor with decreasing pressure and temperature was probably due to increased adsorption selectivity at reduced temperature. This work has demonstrated the potential of MFI zeolite membranes for O-2/N-2 separations at cryogenic temperature. (C) 2015 The Authors. Published by Elsevier B.V.