The structures of ferroelectric Pb(Zr0.53Ti0.47)O-3 and high-T-c YBa2Cu3O7-delta superconductor integrated films on (001) SrTiO3 substrate prepared by the r.f./d.c. magnetron sputtering method have been studied by X-ray grazing incidence reflectivity, diffuse scattering and high-resolution X-ray diffraction methods combined with atomic force microscopy (AFM) and SEM techniques. The results of high-resolution X-ray diffraction show that the quality of Pb(Zr0.53Ti0.47)O-3 improved as the thickness increased. On the other hand, the crystalline quality of YBa2Cu3O7-delta deteriorated and the superconducting transition temperature, T-c, decreased as the thickness of Pb(Zr0.53Ti0.47)O-3 increased. The strain state was similar for different thickness samples and the lattice mismatch strain in the Pb(Zr0.53Ti0.47)O-3 layer was almost totally relaxed. The root mean square (r.m.s.) roughness at Pb(Zr0.53Ti0.47) O-3/YBa2Cu3O7-delta interface was determined to be about 1.7 +/- 0.3 nm by X-ray specular reflectivity. The r.m.s. roughness at the surface of Pb(Zr0.53Ti0.47)O-3/YBa2Cu3O7-delta bilayer samples was about 1.5 to 2.0 +/- 0.3 nm which was larger than that of YBa2Cu3O7-delta single-layer sample measured by both X-ray specular reflectivity and AFM methods. The results from AFM and SEM show that the morphological characteristics of the Pb(Zr0.53Ti0.47)O-3 layer surface were large grains covering about 10% in area distributed on a fine-grained matrix.