Three-dimensional hierarchical micro and mesoporous silicon carbide spheres (MMPSiC) are prepared by the template method and carbonization reaction via the aerosol spray drying method. The mesopores are generated by the self-assembly of the structure-directing agents, whereas the micropores are derived from the partial evaporation of Si atoms during carbonization. To investigate the effect of mesopore size on electrochemical performance, three types of MMPSiC with different mesopore size were fabricated by using three different structure directing agents (cetyltriethylammonium bromide (CTAB), Polyethylene glycol hexadecyl ether (Brij56), and Poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (P123)). The MMPSiC electrode prepared with Brij56 exhibits the highest charge storage capacity with a specific capacitance of 253.7 F g(-1) at a scan rate of 5 mV s(-1) and 87.9% rate performance from 5 to 500 mV s(-1) in 1 M Na2SO4 aqueous electrolyte. The outstanding electrochemical performance might be because of the ideal mesopore size, which effectively reduces the resistant pathways for ion diffusion in the pores and provides a large accessible surface area for ion transport/charge storage. These encouraging results demonstrate that the MMPSiC prepared with Brij56 is a promising candidate for high performance electrode materials for supercapacitors. (C) 2015 Elsevier B.V. All rights reserved.