We measured the solubility of bis-(2,2,6,6-tetramethyl-3,5-heptanedionato)copper(II) (Cu(tmhd)2) in pure supercritical CO2 (scCO(2)) and binary mixtures of H-2 and scCO(2) at 40-100 degrees C and 11-20 MPa using spectrometric method. The solubility in scCO(2) was dependent on the density of CO2. The addition of H-2 to the scCO(2) had negative impact on the solubility, and the solubility was proportional to density of CO2 with a constant mole fraction of H-2. The equations proposed by Mendez-Santiago and Teja as well as Sauceau et al. were able to correlate the solubility in the pure CO2 and binary systems. This approach provides a framework to determine the precursor concentration for supercritical fluid deposition (SCFD) of Cu. The precursor feed system for optimal Cu-SCFD was discussed. In addition, the same effect was found with the addition of O-2 and N-2 into scCO(2), suggesting that further investigation into the solubility of SCFD precursors in these binary systems is warranted. (C) 2015 Elsevier B.V. All rights reserved.