Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.1, 43-45, 1994 Export Citation Silica Coating of Aluminum Nitride Particles by Radiofrequency Plasma Chemical-Vapor-Deposition Tsugeki K, Yan S, Maeda H, Kusakabe K, Morooka S Keywords:POWDER Please enable JavaScript to view the comments powered by Disqus.