Molecular Crystals and Liquid Crystals, Vol.374, 207-210, 2002
Nitrogen rich carbon nitride thin films deposited by hybrid PLD technique
Highly nitrogenated CNx films were created by pulsed laser deposition (PLD), combined with radiofrequency (RF) and hollow cathode (HC) discharges. The N/C ratio higher than 1 was measured. Deposition set-up and results of optical measurement are discussed.