Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.13, No.12, 898-900, 1994 DOI10.1007/BF00273243 Export Citation 2-Temperature Technique for Plasma-Enhanced Chemical-Vapor-Deposition Growth of Silicon-Nitride on InP Her J, Lim H, Kim CH, Han IK, Lee JI, Kang KN, Kim JE, Park HY Please enable JavaScript to view the comments powered by Disqus.
